Air Conditioning Systems for Semiconductor

The production environment for semiconductor devices is extremely sensitive to the presence of contaminants. Even small amounts of gaseous or particulate contaminants can reduce product quality. Therefore, cleanliness requirements in semiconductor device manufacturing are far higher than in other industries.     Throughout the entire chip and semiconductor device manufacturing process, process environment contamination control is crucial. The air cleanliness of core processes needs to meet ISO Class 1 standards, with gaseous molecular contaminant (AMC) concentrations below one part per billion. Substandard process environments can lead to a significant reduction in product yield.   Ordinary air contains a large number of particulate contaminants such as microparticles and dust, as well as gaseous contaminants such as sulfur dioxide, nitrogen oxides, and ammoniaaa. Only after treatment can it enter a cleanroom. Because cleanrooms used for producing semiconductors and other microelectronic devices must maintain standard cleanliness levels 24/7, the cleanroom air conditioning system (including the exhaust system), its associated heat and cold sources, and corresponding delivery systems must operate 24 hours a day, which is significantly different from other conventional air conditioning systems.   As the power source, the fan consumes most of its energy due to the combined resistance of its components. Furthermore, the air filter's resistance accounts for approximately 50% of the fan's total head. Therefore, reducing the energy consumption of air conditioning filters is crucial for lowering building energy consumption and carbon emissions. From the perspective of improving energy efficiency and reducing energy consumption, optimizing air filter performance without compromising filtration requirements is essential.     Filter energy consumption is directly determined by average resistance and is related to initial resistance and dust holding capacity. Reducing initial resistance, increasing dust holding capacity, and minimizing the increase in resistance during dust holding are effective ways to reduce energy consumption, thus lowering energy costs for customers and contributing to environmental protection.